Marvelous Micro Electro-Mechanical Systems
Summary :
Table of Contents
- Introduction
- Challenges for MEMS products
- MEMS manufacturing procedure
- Packaging of MEMS
- Types of MEMS packaging
- Methods of MEMS packaging
- MEMS applications
- Conclusions
- References
Abstract
Attention to microelectromechanical systems (MEMS) continues to increase worldwide and MEMS has a phenomenal growth in the past decade because of wide range of application. MEMS technology is become most rapid changing field today, this is due to its wide application including medicine and bioengineering like DNA and genetic code analysis and synthesis, drug delivery, diagnostics and imaging, automotive systems as transducers and accelerometers, manufacturing and fabrication micro scale smart robots, automotive industry, process control and automation scientific and medical instrumentation, telecommunication, commodity products environmental monitoring, etc. Any development and deployment of MEMS therefore will have a great impact on any industry. Development of MEMS is therefore critical to the economy and society. This paper reviews the basic aspects of MEMS technology, fabrication, commercialization and technological difficulties and its application to various fields of engineering, medical and bio medical.
Key Words: Fabrication of MEMS, MEMS, MEMS application,
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